Description
Smallest Sensor; Ultra-High Resolution and Accuracy with Digital Output; Uses Tape, Linear Glass, or Rotary Scales with Stick-On Index and Limits
The Mercury II 6000 series has the smallest sensor in its class - only 8.2mm high. Resolutions are programmable and range from 5μm to 1.2nm; accuracy is up to ±1μm; and the encoder output is digital. High short-range accuracy, up to ±20nm, provides smooth velocity control. The same sensor works with tape or glass scales, either linear or rotary. The small sensor, high performance, robustness, versatility and ease of use make the MII 6000 encoder series ideal for small stages, piezo motor systems, actuators, voice coil motors, systems with moveable optics, micromachining / nanomanufacturing, and many other applications.
Resolution: Programmable, 5μm to 1.2nm
Outputs: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface
Scales: Tape or Glass, Linear or Rotary
Vacuum Model: 10-8 torr, 150°C bake out
View the data sheet to learn more.
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